Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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02/28/2006
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Application #:
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10354945
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Filing Dt:
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01/29/2003
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Publication #:
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Pub Dt:
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11/13/2003
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Inventors:
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Peter Lokai, Thomas Schroeder, Juergen Kleinschmidt, Uwe Stamm, Klaus Wolfgang Vogler
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Title:
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ABSOLUTE WAVELENGTH CALIBRATION OF LITHOGRAPHY LASER USING MULTIPLE ELEMENT OR TANDEM SEE THROUGH HOLLOW CATHODE LAMP
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Assignment:
1
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| HANS-BOECKLER-STRASSE 12 |
| GOETTINGEN, GERMANY D-37079 |
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| MICHAEL A. STALLMAN |
| MORRISON & FOERSTER LLP |
| 425 MARKET STREET |
| SAN FRANCISCO, CA 94105 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HANS-BOECKLER-STRASSE 12 |
| GOETTINGEN, GERMANY D-37079 |
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| STALLMAN & POLLOCK LLP |
| ATTN: BRIAN J. KEATING |
| 121 SPEAR STREET, SUITE 290 |
| SAN FRANCISCO, CA 94105 |
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Assignment:
3
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| HANS-BOECKLER-STRASSE 12 |
| GOETTINGEN, GERMANY D-37079 |
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| MICHAEL A. STALLMAN |
| MORRISON & FOERSTER LLP |
| 425 MARKET STREET |
| SAN FRANCISCO, CA 94105 |
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