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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
7006595
Issue Dt:
02/28/2006
Application #:
10150650
Filing Dt:
05/17/2002
Publication #:
20030086524
Pub Dt:
05/08/2003
Inventors:
WOLFGANG SINGER, JORG SCHULTZ, JOHANNES WANGLER, KARL-HEINZ SCHUSTER, UDO DINGER et al
Title:
ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
Assignment: 1
Reel/Frame:
013310/0585Recorded: 09/20/2002Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SCHULTZ, JORG
Exec Dt:
08/12/2002
WANGLER, JOHANNES
Exec Dt:
08/13/2002
SCHUSTER, KARL-HEINZ
Exec Dt:
08/08/2002
DINGER, UDO
Exec Dt:
08/22/2002
SINGER, WOLFGANG
Exec Dt:
08/09/2002
ANTONI, MARTIN
Exec Dt:
08/07/2002
WIETZORREK, JOACHIM
Exec Dt:
08/15/2002
HAINZ, JOACHIM
Exec Dt:
08/12/2002
Assignee:
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22
73447 OBERKOCHEN, GERMANY
Correspondent:
OHLANDT, GREELEY, RUGGIERO ET AL.
CHARLES N.J. RUGGIERO, ESQ.
ONE LANDMARK SQUARE, 10TH FLOOR
STAMFORD, CT 06901-2682
Assignment: 2
Reel/Frame:
017655/0531Recorded: 05/19/2006Pages: 7
Conveyance:
ASSIGNMENT-NAME CHANGE
Assignors:
SCHULTZ, JORG
Exec Dt:
08/12/2002
WANGLER, JOHANNES
Exec Dt:
08/13/2002
SCHUSTER, KARL-HIENZ
Exec Dt:
08/08/2002
DINGER, UDO
Exec Dt:
08/22/2002
SINGER, WOLFGANG
Exec Dt:
08/09/2002
ANTONI, MARTIN
Exec Dt:
08/07/2002
WIETZORREK, JOACHIM
Exec Dt:
08/15/2002
HAINZ, JOACHIM
Exec Dt:
08/12/2002
Assignee:
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22
73447 OBERKOCHEN, GERMANY
Correspondent:
OHLANDT, GREELEY, RUGGIERO & PERLE, LLP
ONE LANDMARK SQUARE, 10TH FLOOR
STAMFORD, CT 06901
Assignment: 3
Reel/Frame:
017769/0635Recorded: 06/12/2006Pages: 4
Conveyance:
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Assignor:
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Exec Dt:
08/27/2002
Assignee:
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22
OBERKOCHEN, GERMANY 73447
Correspondent:
OHLANDT, GREELEY, RUGGIERO & PERLE, LLP
ONE LANDMARK SQUARE, 10TH FLOOR
STAMFORD, CT 06901

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