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Patent Assignment Abstract of Title
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Total Assignments: 5
Patent #:
7011868
Issue Dt:
03/14/2006
Application #:
10627894
Filing Dt:
07/24/2003
Publication #:
20040028916
Pub Dt:
02/12/2004
Inventors:
Carlo Waldfried, Qingyuan Han, Orlando Escorcia, Atsushi Shiota, Ralph Albano et al
Title:
FLUORINE-FREE PLASMA CURING PROCESS FOR POROUS LOW-K MATERIALS
Assignment: 1
Reel/Frame:
014391/0159Recorded: 08/18/2003Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
SHIOTA, ATSUSHI
Exec Dt:
07/01/2003
Assignee:
JSR CORPORATION
2-11-24, TSUKIJI, CHUO-KU
TOKYO, JAPAN
Correspondent:
KILLWORTH, GOTTMAN, HAGAN & SCHAEFF, LLP
BRIAN L. SMILER
ONE SOUTH MAIN STREET, SUITE 500
ONE DAYTON CENTRE
DAYTON, OH 45402
Assignment: 2
Reel/Frame:
014992/0338Recorded: 02/20/2004Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
WALDFRIED, CARLO
Exec Dt:
07/21/2003
HAN, QINGYUAN
Exec Dt:
07/21/2003
ESCORCIA, ORLANDO
Exec Dt:
07/18/2003
BERRY, IVAN L., III
Exec Dt:
07/21/2003
ALBANO, RALPH
Exec Dt:
07/18/2003
Assignee:
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01915
Correspondent:
DINSMORE & SHOHL, LLP
ONE DAYTON CENTRE
ONE SOUTH MAIN STREET, SUITE 500
DAYTON, OH 45402
Assignment: 3
Reel/Frame:
020986/0143Recorded: 05/09/2008Pages: 36
Conveyance:
SECURITY AGREEMENT
Assignor:
AXCELIS TECHNOLOGIES, INC.
Exec Dt:
04/23/2008
Assignee:
SILICON VALLEY BANK
3003 TASMAN DRIVE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
CHRISTOPHER E. KONDRACKI
2001 JEFFERSON DAVIS, HWY., SUITE 1007
ARLINGTON, VA 22202
Assignment: 4
Reel/Frame:
053375/0055Recorded: 07/31/2020Pages: 40
Conveyance:
SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
AXCELIS TECHNOLOGIES, INC.
Exec Dt:
07/31/2020
Assignee:
SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
3003 TASMAN DRIVE, HF 150
SANTA CLARA, CALIFORNIA 95054
Correspondent:
JAY DASILVA
1025 VERMONT AVE NW, SUITE 1130
COGENCY GLOBAL INC.
WASHINGTON, DC 20005
Assignment: 5
Reel/Frame:
063270/0277Recorded: 04/07/2023Pages: 37
Conveyance:
RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
Assignor:
SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
Exec Dt:
04/05/2023
Assignee:
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01915
Correspondent:
MINTZ LEVIN
ONE FINANCIAL CENTER
BOSTON, MA 02111

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