Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/18/2006
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Application #:
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10303847
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Filing Dt:
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11/26/2002
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Publication #:
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Pub Dt:
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06/05/2003
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Inventor:
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Mitsuhiro Yuasa
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Title:
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METHOD OF MANUFACTURING MASK FOR ELECTRON BEAM LITHOGRAPHY AND MASK BLANK FOR ELECTRON BEAM LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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| CROWELL & MORING, LLP |
| HERBERT I. CANTOR |
| P.O. BOX 14300 |
| WASHINGTON, D.C. 20044-4300 |
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