Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/18/2006
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Application #:
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10831293
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Filing Dt:
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04/26/2004
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Publication #:
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Pub Dt:
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01/06/2005
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Inventors:
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Toralf Gruner, Manfred Maul, Rudolf Von Buenau
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Title:
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MICROLITHOGRAPHIC ILLUMINATION METHOD AND A PROJECTION LENS FOR CARRYING OUT THE METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| 73447 OBERKOCHEN, GERMANY |
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| SUGHRUE MION, PLLC |
| GEORGE F. KEHNIGK |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| SUITE 800 |
| WASHINGTON, DC 20037 |
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