Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10781945
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Filing Dt:
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02/20/2004
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Publication #:
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Pub Dt:
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08/25/2005
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Inventors:
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Norbertus Josephus Martinus Van Den Nieuwelaar, Johannes Onvlee, Roel Boumen
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Title:
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METHOD OF CONTROLLING A LITHOGRAPHIC PROCESSING CELL, DEVICE MANUFACTURING METHOD, LITHOGRAPHIC APPARATUS, TRACK UNIT LITHOGRAPHIC PROCESSING CELL, AND COMPUTER PROGRAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP LLP |
| PO BOX 10500 |
| MCLEAN, VA 22102 |
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