Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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10838827
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Filing Dt:
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05/04/2004
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Inventors:
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Khoi A. Phan, Bhanwar Singh, Ramkumar Subramanian
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Title:
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SCATTEROMETRY MONITOR IN CLUSTER PROCESS TOOL ENVIRONMENT FOR ADVANCED PROCESS CONTROL (APC)
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE AMD PALCE |
| P.O. BOX 3453 |
| SUNNYVALE, CALIFORNIA 94088-3453 |
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| AMIN & TUROCY, LLP |
| HIMANSHU S. AMIN |
| 24TH FLOOR, NATIONAL CITY CENTER |
| 1900 E. 9TH STREET |
| CLEVELAND, OH 44114 |
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