Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/12/2006
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Application #:
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10273405
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Filing Dt:
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10/18/2002
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Publication #:
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Pub Dt:
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04/29/2004
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Inventors:
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Santiago del Puerto, Daniel N. Galburt, Andrew W. McCullough, Stephen Roux et al
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Title:
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METHOD AND APPARATUS FOR COOLING A RETICLE DURING LITHOGRAPHIC EXPOSURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| STERNE, KESSLER, GOLDSTEIN & FOX PLLC |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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