Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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09/19/2006
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Application #:
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11067099
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Filing Dt:
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02/25/2005
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Publication #:
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Pub Dt:
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08/31/2006
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Inventors:
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Norbert R. Bowering, Bjorn A. M. Hansson, Alexander N. Bykanov, Oleh Khodykin et al
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Title:
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SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE FROM PLASMA-GENERATED DEBRIS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL DEPT., MS/4-2C |
| 17075 THORNMINT COURT |
| SAN DIEGO, CALIFORNIA 92127 |
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| MATTHEW K. HILLMAN |
| CYMER, INC. |
| LEGAL DEPT., MS/4-2C |
| 17075 THORNMINT COURT |
| SAN DIEGO, CA 92127 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT - MS/4-2D |
| SAN DIEGO, CALIFORNIA 92127 |
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| JEFFREY J BROOKS |
| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT - MS/4-2D |
| SAN DIEGO, CA 92127 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| ASML NETHERLANDS B.V. |
| P.O. BOX 324 |
| VELDHOVEN, 5500 AH NETHERLANDS |
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