Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/26/2006
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Application #:
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10653661
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Filing Dt:
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09/02/2003
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Publication #:
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Pub Dt:
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03/03/2005
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Inventors:
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Ignacio Blanco, Jin Zhao, Nathan Kruse
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Title:
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A METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES COMPRISING A DEPOSITION TOOL CLEANING PROCESS HAVING A MOVING PLASMA ZONE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 655474 |
| MS 3999 |
| DALLAS, TEXAS 75265 |
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| TEXAS INSTRUMENTS INCORPORATED |
| JACKI GARNER |
| P.O. BOX 655474 |
| DALLAS, TX 75265 |
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