Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/26/2006
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Application #:
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10797570
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Filing Dt:
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03/11/2004
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Publication #:
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Pub Dt:
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12/23/2004
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Inventors:
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Ralph Brinkhof, Marcus Emile Joannes Boonman, Martin Jules Marie-Emile De Nivelle
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Title:
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ASSEMBLY COMPRISING A SENSOR FOR DETERMINING AT LEAST ONE OF TILT AND HEIGHT OF A SUBSTRATE, A METHOD THEREFOR AND A LITHOGRAPHIC PROJECTION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP LLP |
| INTELLECTUAL PROPERTY GROUP |
| PO BOX 10500 |
| MCLEAN, VA 22102 |
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