Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/10/2006
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Application #:
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10814303
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Filing Dt:
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04/01/2004
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Publication #:
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Pub Dt:
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12/16/2004
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Inventors:
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Takashi Sato, Shoji Mimotogi, Shigeru Hasebe
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Title:
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EXPOSURE METHOD, EXPOSURE QUANTITY CALCULATING SYSTEM USING THE EXPOSURE METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE EXPOSURE METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1-1, SHIBAURA 1-CHOME, MINATO-KU |
TOKYO 105-8001,, JAPAN |
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FINNEGAN, HENDERSON ET AL |
ERNEST F CHAPMAN |
1300 I STREET, N.W. |
WASHINGTON, DC 20005-3315 |
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