Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/24/2006
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Application #:
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10474121
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Filing Dt:
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03/26/2004
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Publication #:
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Pub Dt:
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09/23/2004
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Inventors:
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Jurgen Klein, Willi Neff, Stefan Seiwert, Klaus Bergmann, Joseph Pankert, Michael Loken
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Title:
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METHOD AND DEVICE FOR PRODUCING EXTREME ULTRAVIOLET RADIATION AND SOFT X-RAY RADIATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEONRODSTR. 68 |
| MUNCHEN, GERMANY 80636 |
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| STEINDAMM 94 |
| HAMBURG, GERMANY 20099 |
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| GROENEWOUDSEWEG 1 |
| EINDHOVEN, NETHERLANDS 5621 BA |
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| GUDRUN E. HUCKETT |
| LONSSTR. 53 |
| WUPPERTAL, GERMANY 42289 |
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