Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/21/2006
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Application #:
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10810804
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Filing Dt:
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03/29/2004
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Publication #:
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Pub Dt:
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09/29/2005
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Inventors:
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Chang-Rong Wu, Yinan Chen, Tuz-Ching Tsai
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Title:
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METHOD AND COMPOSITE HARD MASK FOR FORMING DEEP TRENCHES IN A SEMICONDUCTOR SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HWA-YA TECHNOLOGY PARK 669 |
| FUHSING 3 RD., KUEISHAN |
| TAOYUAN, TAIWAN R.O.C. |
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| BACON & THOMAS, PLLC |
| EUGENE MAR |
| 625 SLATERS LANE FOURTH FLOOR |
| ALEXANDRIA, VA 22314 |
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