Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/12/2006
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Application #:
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10495648
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Filing Dt:
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10/26/2004
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Publication #:
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Pub Dt:
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04/21/2005
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Inventors:
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Kalus Breitschwerdt, Franz Laermer, Andrea Urban
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Title:
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HOLDING DEVICE, IN PARTICULAR FOR FIXING A SEMICONDUCTOR WAFER IN A PLASMA ETCHING DEVICE, AND METHOD FOR SUPPLYING HEAT TO OR DISSIPATING HEAT FROM A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P OSTFACH 30 02 20 |
| D-70442 STUTTGART, GERMAN DEMOCRATIC REPUBLIC |
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| KENYON & KENYON |
| ONE BROADWAY |
| NEW YORK, NY 10004 |
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