Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/03/2007
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Application #:
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10904149
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Filing Dt:
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10/26/2004
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Publication #:
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Pub Dt:
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04/27/2006
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Inventors:
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Yi-Fang Cheng, Shan-Jen Yu, Cheng-Kweng Chen, Yu-Ming Huang
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Title:
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METHOD FOR REMOVING POLYMER AS ETCHING RESIDUE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 3, LI-HSIN RD. II, SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN |
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| JIANG CHYUN INTELLECTUAL PROPERTY OFC |
| 7F-1 NO 100 ROOSEVELT RD |
| SECTION 2 |
| TAIPEI, TAIWAN 100 |
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