Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/17/2007
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Application #:
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10002676
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Filing Dt:
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10/31/2001
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Inventors:
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Linda Braly, Vahid Vahedi, Erik Edelberg, Alan Miller
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Title:
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METHOD FOR PLANARIZATION ETCH WITH IN-SITU MONITORING BY INTERFEROMETRY PRIOR TO RECESS ETCH
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE & PENILLA, LLP |
| EDMUND H. MIZUMOTO |
| 710 LAKEWAY DRIVE, SUITE 170 |
| SUNNYVALE, CA 94085 |
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