Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/15/2007
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Application #:
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10644745
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Filing Dt:
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08/21/2003
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Publication #:
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Pub Dt:
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12/15/2005
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Inventor:
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Hideki Tanaka
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Title:
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PLASMA LEAK MONITORING METHOD, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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CORRECTIVE ASSIGNMENT TO CORRECT THE SERIAL 10/644754, PREVIOUSLY RECORDED ON REEL 014823 FRAME 0554.
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT & |
| LLP |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, DC 20005-3315 |
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