Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/15/2007
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Application #:
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10223422
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Filing Dt:
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08/20/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Inventors:
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Sachio Uto, Minoru Yoshida, Toshihiko Nakata, Shunji Maeda
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Title:
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METHOD AND APPARATUS FOR INSPECTING PATTERN DEFECTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & ET AL. |
| MELVIN KRAUS |
| 1300 NORTH SEVENTEENTH STREET |
| STE. 1800 |
| ARLINGTON, VA 22209 |
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