Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/14/2007
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Application #:
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10255460
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Filing Dt:
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09/26/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Inventors:
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Mirko Vukovic, Edward L. Sill
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Title:
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PROCESS APPARATUS AND METHOD FOR IMPROVING PLASMA PRODUCTION OF AN INDUCTIVELY COUPLED PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME |
| TBS BROADCAST CENTER MINATO-KU |
| TOKYO 107, JAPAN |
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| WOOD, HERRON & EVANS, L.L.P. |
| DONALD F. FREI |
| 441 VINE STREET |
| 2700 CAREW TOWER |
| CINCINNATI, OH 45202 |
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