Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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09/25/2007
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Application #:
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09934817
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Filing Dt:
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08/21/2001
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Publication #:
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Pub Dt:
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01/24/2002
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Inventors:
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Christian Wagner, Michael Trunz, Ralf Hilgers
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Title:
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OPTICAL ARRANGEMENT AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH PASSIVE THERMAL COMPENSATION
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Assignment:
1
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| CARL-ZEISS-STRASSE |
| OBERKOCHEN, GERMANY 73447 |
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| THOMAS S. BAKER, JR. |
| 1371 WEST 3RD AVENUE |
| COLUMBUS, OH 43212 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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Assignment:
3
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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