Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/16/2007
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Application #:
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11218127
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Filing Dt:
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09/01/2005
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Publication #:
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Pub Dt:
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12/29/2005
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Inventors:
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Abdurrahman Sezginer, Michelle Zimmerman
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Title:
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OVERLAY TARGETS WITH ISOLATED, CRITICAL-DIMENSION FEATURES AND APPARATUS TO MEASURE OVERLAY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER |
| 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-8481 |
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| MICHAEL A. STALLMAN |
| STALLMAN & POLLOCK LLP |
| 353 SACRAMENTO STREET, SUITE 2200 |
| SAN FRANCISCO, CA 94111 |
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