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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7286284
Issue Dt:
10/23/2007
Application #:
10917626
Filing Dt:
08/13/2004
Publication #:
20060012873
Pub Dt:
01/19/2006
Inventors:
Michael Totzeck, Heiko Feldmann, Toralf Gruner, Karl-Heinz Schuster et al
Title:
MICROSCOPE IMAGING SYSTEM AND METHOD FOR EMULATING A HIGH APERTURE IMAGING SYSTEM, PARTICULARLY FOR MASK INSPECTION
Assignment: 1
Reel/Frame:
015474/0175Recorded: 12/17/2004Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TOTZECK, MICHAEL
Exec Dt:
11/15/2004
FELDMANN, HEIKO
Exec Dt:
11/16/2004
GRUNER, TORALF
Exec Dt:
11/15/2004
SCHUSTER, KARL-HEINZ
Exec Dt:
11/22/2004
GREIF-WUESTENBECKER, JOEM
Exec Dt:
11/08/2004
SCHERUEBL, THOMAS
Exec Dt:
11/08/2004
HARNISCH, WOLFGANG
Exec Dt:
12/02/2004
ROSENKRANZ, NORBERT
Exec Dt:
11/08/2004
STROESSNER, ULRICH
Exec Dt:
11/08/2004
Assignee:
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10
D-07745 JENA, GERMAN DEMOCRATIC REPUBLIC
Correspondent:
REED SMITH LLP
C/O GERALD H. KIEL
599 LEXINGTON AVENUE
NEW YORK, NEW YORK 10022-7650
Assignment: 2
Reel/Frame:
040069/0705Recorded: 09/19/2016Pages: 7
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
CARL ZEISS SMS GMBH
Exec Dt:
05/12/2015
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
MARC WEFERS
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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