Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/13/2007
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Application #:
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11532134
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Filing Dt:
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09/15/2006
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Inventors:
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Eun Sang LEE, Jong Goo WON, Jung Talk LEE
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Title:
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MOVING HEAD FOR SEMICONDUCTOR WAFER POLISHING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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INHA UNIVERSITY |
253 YONGHYEON-DONG, NAM-GU |
INCHEON, KOREA, REPUBLIC OF 402-751 |
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MUCH SHELIST FREED DENENBERG AMENT & RUB |
191 N WACKER DRIVE, SUITE 1800 |
ADAM K SACHAROFF |
CHICAGO, IL 60606 |
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