Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/01/2008
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Application #:
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11083899
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Filing Dt:
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03/21/2005
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Publication #:
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Pub Dt:
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09/21/2006
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Inventors:
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Tadahiro Ishizaka, Kaoru Yamamoto
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Title:
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PLASMA ENHANCED ATOMIC LAYER DEPOSITION SYSTEM AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MONATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT ASSIGNEE'S ADDRESS PREVIOUSLY RECORDED AT REEL 016707/0483
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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