Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/01/2008
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Application #:
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11121437
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Filing Dt:
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05/04/2005
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Inventors:
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Adam R. Pawloski, Harry J. Levinson, Jongwook Kye
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Title:
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METHOD AND APPARATUS FOR REDUCING BIOLOGICAL CONTAMINATION IN AN IMMERSION LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE AMD PLACE; P.O. BOX 3453 |
| SUNNYVALE, CALIFORNIA 94088-3453 |
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| M. DAVID GALIN |
| 1621 EUCLID AVE. - 19TH FLOOR |
| RENNER, OTTO ET AL. |
| CLEVELAND, OH 44115 |
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