Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/29/2008
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Application #:
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11239403
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Filing Dt:
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09/30/2005
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Publication #:
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Pub Dt:
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07/27/2006
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Inventors:
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Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka
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Title:
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COATING AND DEVELOPING APPARATUS AND COATING AND DEVELOPING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| SMITH, GAMBRELL & RUSSELL |
| 1850 M STREET, NW |
| SUITE 800 |
| WASHINGTON, D.C. 20036 |
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