Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/29/2008
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Application #:
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11208424
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Filing Dt:
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08/19/2005
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Publication #:
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Pub Dt:
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03/09/2006
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Inventor:
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Henry Allen Hill
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Title:
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SUB-NANOMETER OVERLAY, CRITICAL DIMENSION, AND LITHOGRAPHY TOOL PROJECTION OPTIC METROLOGY SYSTEMS BASED ON MEASUREMENT OF EXPOSURE INDUCED CHANGES IN PHOTORESIST ON WAFERS
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1665 E. 18TH STREET |
SUITE 206 |
TUCSON, ARIZONA 85719 |
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ERIC L. PRAHL |
WILMER CUTLER PICKERING HALE & DORR LLP |
60 STATE STREET |
BOSTON, MA 02109 |
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