Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/12/2008
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Application #:
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10755846
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Filing Dt:
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01/12/2004
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Publication #:
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Pub Dt:
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12/23/2004
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Inventors:
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Martin Antoni, Nils Dieckmann, Dirk Rothweiler, Jorg Schultz, Wolfgang Singer
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Title:
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EUV ILLUMINATION SYSTEM HAVING A PLURALITY OF LIGHT SOURCES FOR ILLUMINATING AN OPTICAL ELEMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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CARL-ZEISS-STRASSE 22 |
OBERKOCHEN, GERMANY 73447 |
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OHLANDT, GREELEY, RUGGIERO ET AL. |
CHARLES N.J. RUGGIERO, ESQ. |
ONE LANDMARK SQUARE, 10TH FLOOR |
STAMFORD, CT 06901-2682 |
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Assignment:
2
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RUDOLF-EBER-STRASSE 2 |
73447 OBERKOCHEN, GERMANY |
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TIMOTHY A. FRENCH |
FISH & RICHARDSON P.C. |
ONE MARINA PARK DRIVE |
BOSTON, MASSACHUSETTS 02210-1878 |
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