Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/12/2008
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Application #:
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10665360
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Filing Dt:
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09/22/2003
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Publication #:
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Pub Dt:
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06/17/2004
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Inventors:
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Richard Johannes Van Haren, Paul Christiaan Hinnen, Sanjay Lalbahadoersing et al
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Title:
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MARKER STRUCTURE FOR OPTICAL ALIGNMENT OF A SUBSTRATE, A SUBSTRATE INCLUDING SUCH A MARKER STRUCTURE, AN ALIGNMENT METHOD FOR ALIGNING TO SUCH A MARKER STRUCTURE, AND A LITHOGRAPHIC PROJECTION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 1110 |
| NL-5503 LA VELDHOVEN, NETHERLANDS |
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| PILLSBURY WONTHROP LLP |
| JOHN P. DARLING |
| 1133 CONNECTICUT AVENUE, N.W. |
| WASHINGTON, DC 20036 |
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