Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/04/2008
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Application #:
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09667777
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Filing Dt:
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09/22/2000
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Inventors:
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Mitsuaki Komino, Hideaki Amano, Shosuke Endo, Toshiaki Fujisato, Yasuharu Sasaki
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Title:
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ELECTRODE, SUSCEPTOR, PLASMA PROCESSING APPARATUS AND METHOD OF MAKING THE ELECTRODE AND THE SUSCEPTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| ERNEST F. CHAPMAN |
| FINNEGAN, HENDERSON, FARABOW, ETAL |
| 1300 I STREET NW |
| WASHINGTON, D.C. 20005-3315 |
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