Patent Assignment Abstract of Title
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Total Assignments:
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Patent #:
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Issue Dt:
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03/11/2008
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Application #:
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11155885
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Filing Dt:
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06/20/2005
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Publication #:
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Pub Dt:
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12/21/2006
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Inventors:
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Henricus Wilhelmus Van Buel, Peter Ten Berge, Markus Theodoor Van Der Heijden
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Title:
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PRE-ALIGNING A SUBSTRATE IN A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED BY THE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
NL-5504 DR |
VELDHOVEN, NETHERLANDS |
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PILLSBURY WINTHROP SHAW PITTMAN LLP |
P.O. BOX 10500 |
1600 TYSONS BOULEVARD |
MCLEAN, VA 22102 |
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