Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/22/2008
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Application #:
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11241894
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Filing Dt:
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09/30/2005
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Publication #:
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Pub Dt:
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10/05/2006
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Inventors:
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Russell J. Low, Joseph C. Olson, David R. Timberlake, James R. McLane, Mark D. Saunders et al
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Title:
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METHODS AND APPARATUS FOR GLITCH RECOVERY IN STATIONARY-BEAM ION IMPLANTATION PROCESS USING FAST ION BEAM CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GL37 |
| GLOUCESTER, MASSACHUSETTS 01930-2297 |
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| MARK SUPERKO |
| GL37 |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930-2297 |
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