Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/29/2008
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Application #:
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11201266
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Filing Dt:
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08/10/2005
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Publication #:
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Pub Dt:
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02/16/2006
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Inventors:
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Hiroyuki Matsuo, Toshiki Nakajima, Kunihiro Miyazaki
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Title:
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ETCHING METHOD, A METHOD OF FORMING A TRENCH ISOLATION STRUCTURE, A SEMICONDUCTOR SUBSTRATE AND A SEMICONDUCTOR APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-1 NISHI-SHINJUKU 2-CHOME |
| SHINJUKU-KU, TOKYO, JAPAN 163-0811 |
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| 1-1, SHIBAURA, 1-CHOME MINATO-KU |
| TOKYO, JAPAN |
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| G. GREGORY SCHIVLEY |
| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MICHIGAN 48303 |
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