Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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06/03/2008
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Application #:
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11386327
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Filing Dt:
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03/22/2006
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Publication #:
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Pub Dt:
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09/27/2007
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Inventors:
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Palanikumaran Sakthivel, Thomas J. Buckley, Alan F. Becknell
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Title:
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PROCESSES FOR MONITORING THE LEVELS OF OXYGEN AND/OR NITROGEN SPECIES IN A SUBSTANTIALLY OXYGEN AND NITROGEN-FREE PLASMA ASHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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108 CHERRY HILL DRIVE |
BEVERLY, MASSACHUSETTS 01915 |
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CANTOR COLBURN LLP |
55 GRIFIN ROAD SOUTH |
BLOOMFIELD, CT 06002 |
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Assignment:
2
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3003 TASMAN DRIVE |
SANTA CLARA, CALIFORNIA 95054 |
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CHRISTOPHER E. KONDRACKI |
2001 JEFFERSON DAVIS, HWY., SUITE 1007 |
ARLINGTON, VA 22202 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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HARNESS, DICKEY & PIERCE, P.L.C. |
P.O. BOX 828 |
BLOOMFIELD HILLS, MI 48303 |
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Assignment:
4
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TERMINATION OF SECURITY AGREEMENT
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108 CHERRY HILL DRIVE |
BEVERLY, MASSACHUSETTS 01905 |
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THOMAS FAHEY |
NATIONAL CORPORATE RESEARCH, LTD. |
1100 G STREET NW, SUITE 420 |
WASHINGTON, DC 20005 |
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