Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/01/2008
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Application #:
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10797608
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Filing Dt:
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03/11/2004
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Publication #:
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Pub Dt:
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03/10/2005
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Inventors:
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Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Raimond Visser et al
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Title:
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TEMPERATURE CONDITIONED LOAD LOCK, LITHOGRAPHIC APPARATUS COMPRISING SUCH A LOAD LOCK AND METHOD OF MANUFACTURING A SUBSTRATE WITH SUCH A LOAD LOCK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP LLP |
| INTELLECTUAL PROPERTY GROUP |
| PO BOX 10500 |
| MCLEAN, VA 22102 |
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