Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/05/2008
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Application #:
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11260187
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Filing Dt:
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10/28/2005
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Publication #:
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Pub Dt:
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05/04/2006
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Inventors:
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Mayuka Oosaki, Chie Shishido, Tatsuya Maeda, Hiroki Kawada
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Title:
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SCANNING ELECTRON MICROSCOPE, METHOD FOR MEASURING A DIMENSION OF A PATTERN USING THE SAME, AND APPARATUS FOR CORRECTING DIFFERENCE BETWEEN SCANNING ELECTRON MICROSCOPES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2414, NISHISHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET, SUITE 1800 |
| ARLINGTON, VA 22209 |
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