Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/12/2008
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Application #:
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11806573
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Filing Dt:
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06/01/2007
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Publication #:
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Pub Dt:
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10/11/2007
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Inventors:
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Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Tsutomu Karimata et al
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Title:
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INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU, |
| TOKYO, JAPAN |
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| WENDEROTH, LIND & PONACK, L.L.P. |
| 1030 15TH STREET NW |
| SUITE 400 EAST |
| WASHINGTON, DC 20005 |
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