Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/18/2008
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Application #:
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11697090
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Filing Dt:
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04/05/2007
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Publication #:
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Pub Dt:
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10/09/2008
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Inventor:
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Chih-Ming Chiang
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Title:
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METHOD AND SYSTEM FOR DETECTING TILT OR SHIFT OF WAFER TRANSFERRED ONTO HOT PLATE IN REAL TIME, AND METHOD AND SYSTEM FOR MONITORING BAKING PROCESS OF WAFERS IN REAL TIME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 3, LI-HSIN RD. |
| II, SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN R.O.C. |
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| J. C. PATENTS |
| 4 VENTURE, SUITE 250 |
| IRVINE, CA 92618 |
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