Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/02/2008
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Application #:
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11605242
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Filing Dt:
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11/29/2006
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Publication #:
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Pub Dt:
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03/29/2007
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Inventors:
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Shunji Maeda, Yasuhiko Nakayama, Minoru Yoshida, Hitoshi Kubota, Kenji Oka
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR SUBSTRATE AND METHOD AND APPARATUS FOR INSPECTING DEFECTS OF PATTERNS OF AN OBJECT TO BE INSPECTED
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Assignment:
1
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MERGER (SEE DOCUMENT FOR DETAILS).
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1753 SHIMONUMABE, NAKAHARA-KU |
KAWASAKI-SHI |
KANAGAWA, JAPAN |
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ANTONELLI, TERRY, STOUT & KRAUS, LLP |
1300 N. 17TH STREET, SUITE 1800 |
ARLINGTON, VIRGINIA 22209 |
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