Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/09/2008
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Application #:
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11375267
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Filing Dt:
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03/14/2006
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Publication #:
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Pub Dt:
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08/31/2006
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Inventors:
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Marco E. Wedowski, Frank Stietz, Bas M. Mertens, Roman Klein
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Title:
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DEVICE, EUV LITHOGRAPHIC DEVICE AND METHOD FOR PREVENTING AND CLEANING CONTAMINATION ON OPTICAL ELEMENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| OBERKOCHEN, GERMANY 73447 |
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| DANIEL J. HUDAK, JR. |
| HUDAK, SHUNK & FARINE CO. LPA |
| 2020 FRONT STREET, SUITE 307 |
| CUYAHOGA FALLS, OH 44221 |
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