Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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01/06/2009
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Application #:
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11452544
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Filing Dt:
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06/13/2006
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Publication #:
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Pub Dt:
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10/19/2006
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Inventors:
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Yan Zhao, Chang-Chun Yeh, Zhong-Wei Chen, Jack Jau
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Title:
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METHOD FOR IN-LINE MONITORING OF VIA/CONTACT HOLES ETCH PROCESS BASED ON TEST STRUCTURES IN SEMICONDUCTOR WAFER MANUFACTURING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1595 MCCANDLESS DRIVE |
MILPITAS, CALIFORNIA 95035 |
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TOWNSEND AND TOWNSEND AND CREW LLP |
TWO EMBARCADERO CENTER, 8TH FLOOR |
SAN FRANCISCO, CA 94111 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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18 CREATION ROAD |
1 SCIENCE PARK |
HSIN-CHU, TAIWAN |
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TOWNSEND AND TOWNSEND AND CREW LLP |
TWO EMBARCADERO CENTER, 8TH FLOOR |
SAN FRANCISCO, CA 94111 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
VELDHOVEN, NETHERLANDS 5504 DR |
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FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER LLP |
901 NEW YORK AVENUE, NW |
WASHINGTON, DC 20001 |
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Assignment:
4
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
VELDHOVEN, NETHERLANDS 5504 DR |
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FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER LLP |
901 NEW YORK AVENUE, NW |
WASHINGTON, DC 20001 |
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