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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7494753
Issue Dt:
02/24/2009
Application #:
11339827
Filing Dt:
01/26/2006
Publication #:
20060208205
Pub Dt:
09/21/2006
Inventors:
Jang Fung Chen, Gabriel Berger, Tamer Coskun, Sangbong Park, Ting Chen
Title:
METHOD, PROGRAM PRODUCT AND APPARATUS FOR IMPROVING CALIBRATION OF RESIST MODELS USED IN CRITICAL DIMENSION CALCULATION
Assignment: 1
Reel/Frame:
017934/0666Recorded: 06/01/2006Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHEN, JANG FUNG
Exec Dt:
04/24/2006
BERGER, GABRIEL
Exec Dt:
05/02/2006
COSKUN, TAMER
Exec Dt:
04/24/2006
PARK, SANGBONG
Exec Dt:
04/30/2006
CHEN, TING
Exec Dt:
04/30/2006
Assignee:
ASML MASKTOOLS B.V.
P.O. BOX 324
5500 AH VELDHOVEN, NETHERLANDS
Correspondent:
MCDERMOTT WILL & EMERY LLP
600 13TH STREET, N.W.
WASHINGTON, D.C. 20005-3096
Assignment: 2
Reel/Frame:
032170/0425Recorded: 02/07/2014Pages: 21
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
ASML MASKTOOLS B.V.
Exec Dt:
12/20/2013
Assignee:
ASML NETHERLANDS B.V.
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondent:
PILLSBURY WINTHROP SHAW PITTMAN, LLP
P.O. BOX 10500
MCLEAN, VA 22102

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