Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/10/2009
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Application #:
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11478273
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Filing Dt:
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06/29/2006
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Publication #:
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Pub Dt:
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01/17/2008
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Inventors:
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Ritwik Bhatia, Li-Qun Xia, Chad Peterson, Hichem M'Saad
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Title:
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DECREASING THE ETCH RATE OF SILICON NITRIDE BY CARBON ADDITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P. O. BOX 450A |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS |
P.O. BOX 450A |
SANTA CLARA, CA 95052 |
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