Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/24/2009
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Application #:
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10847555
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Filing Dt:
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05/17/2004
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Publication #:
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Pub Dt:
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12/23/2004
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Inventors:
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Sven Ulrich, Michael Stuber, Harald Leiste, Lorenz Niederberger, Konrad Sell et al
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Title:
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SYSTEM FOR GENERATING A LOCAL ELECTRON-CYCLOTRON MICROWAVE LOW-PRESSURE PLASMA AT A PREDETERMINED LOCATION WITHIN A PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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WEBERSTRASSE 5 |
KARLSRUHE, GERMANY 76133 |
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KLAUS J. BACH |
4407 TWIN OAKS DRIVE |
MURRYSVILLE, PA 15668 |
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