Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/31/2009
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Application #:
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11558693
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Filing Dt:
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11/10/2006
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Inventors:
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Erich R. Klawuhn, Robert Rozbicki, Girish A. Dixit
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Title:
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APPARATUS AND METHODS FOR DEPOSITION AND/OR ETCH SELECTIVITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| BEYER WEAVER LLP |
| P.O. BOX 70250 |
| OAKLAND, CA 94612-0250 |
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