Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/23/2009
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Application #:
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11386236
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Filing Dt:
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03/21/2006
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Publication #:
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Pub Dt:
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11/02/2006
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Inventors:
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Johannes Rau, Josef Distl, Armin Schoeppach, Hubert Holderer
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Title:
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PROCESS FOR CONNECTING AN OPTICAL ELEMENT OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS TO A MOUNT, AND ASSEMBLY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| 73447 OBERKOCHEN, GERMANY |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| 225 FRANKLIN STREET |
| BOSTON, MA 02110 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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