Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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07/07/2009
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Application #:
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10866916
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Filing Dt:
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06/14/2004
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Publication #:
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Pub Dt:
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02/22/2007
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Inventors:
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Arne C. Benson, Erik D. Olson, Douglas S. Spaeth
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Title:
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SYSTEM AND METHOD FOR CARRYING OUT LIQUID AND SUBSEQUENT DRYING TREATMENTS ON ONE OR MORE WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3455 LYMAN BOULEVARD |
| CHASKA, MINNESOTA 55318-3052 |
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| KAGAN BINDER, PLLC |
| SUITE 200, MAPLE ISLAND BUILDING |
| 221 MAIN STREET NORTH |
| STILLWATER, MN 55082 |
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Assignment:
2
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| 3455 LYMAN BOULEVARD |
| CHASKA, MINNESOTA 55318 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BOULEVARD |
| AUSTIN, TX 78741 |
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Assignment:
3
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| 3455 LYMAN BLVD. |
| CHASKA, MINNESOTA 55318 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD. |
| AUSTIN, TX 78741 |
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