Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/25/2009
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Application #:
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11447045
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Filing Dt:
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06/06/2006
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Publication #:
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Pub Dt:
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12/07/2006
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Inventor:
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Yutaka Akaike
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Title:
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SUBSTRATE SUPPORTING UNIT, AND SUBSTRATE TEMPERATURE CONTROL APPARATUS AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| C. IRVIN MCCLELLAND |
| OBLON, SPIVAK, MCCLELLAND, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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