Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/15/2009
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Application #:
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10971350
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Filing Dt:
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10/22/2004
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Publication #:
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Pub Dt:
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04/06/2006
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Inventors:
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Franz X. Zach, Abdurrahman Sezginer, Gokhan Percin
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Title:
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METHOD AND SYSTEM FOR REDUCING THE IMPACT OF ACROSS-WAFER VARIATIONS ON CRITICAL DIMENSION MEASUREMENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1754 TECHNOLOGY DRIVE |
| SUITE 117 |
| SAN JOSE, CALIFORNIA 95110 |
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| BRINKS HOFER GILSON & LIONE |
| P.O. BOX 10395 |
| CHICAGO, IL 60610 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2655 SEELY AVENUE |
| SAN JOSE, CALIFORNIA 95134-1931 |
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| SHEPPARD MULLIN RICHTER & HAMPTON LLP |
| 333 SOUTH HOPE STREET, 48TH FLOOR |
| LOS ANGELES, CA 90071-1448 |
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